Friday, May 08, 2015

Low Temperature Atomic Layer Deposition of Crystalline In2O3 Films

TOC Graphic

The Journal of Physical Chemistry C
DOI: 10.1021/acs.jpcc.5b03255

Ranjith K. Ramachandran, Jolien Dendooven, Hilde Poelman and Christophe Detavernier
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