Combined Ligand Exchange and Substitution Reactions in Atomic Layer Deposition of Conformal Ge2Sb2Te5 Film for Phase Change Memory Application

Chemistry of Materials

DOI: 10.1021/acs.chemmater.5b00805

Taeyong Eom, Taehong Gwon, Sijung Yoo, Byung Joon Choi, Moo-Sung Kim, Iain Buchanan, Sergei Ivanov, Manchao Xiao and Cheol Seong Hwang
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