Generation of Ensembles of Individually Resolvable Nitrogen Vacancies Using Nanometer-Scale Apertures in Ultrahigh-Aspect Ratio Planar Implantation Masks
Nano Letters
DOI: 10.1021/nl504441m
Igal Bayn, Edward H. Chen, Matthew E. Trusheim, Luozhou Li, Tim Schröder, Ophir Gaathon, Ming Lu, Aaron Stein, Mingzhao Liu, Kim Kisslinger, Hannah Clevenson and Dirk Englund
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