Impact of the atomic layer deposition precursors diffusion on solid-state carbon nanotube based supercapacitors performances

A study on the impact of atomic layer deposition (ALD) precursors diffusion on the performance of solid-state miniaturized nanostructure capacitor array is presented. Three-dimensional nanostructured capacitor array based on double conformal coating of multiwalled carbon nanotubes (MWCNTs) bundles is realized using ALD to deposit Al 2 O 3 as dielectric layer and TiN as high aspect-ratio conformal counter-electrode on 2 μ m long MWCNT bundles. The devices have a small footprint (from 100 μ m 2 to 2500 μ m 2 ) and are realized using an IC wafer-scale manufacturing process with high reproducibility (≤0.3E-12F deviation). To evaluate the enhancement of the electrode surface, the measured capacitance values are compared to a lumped circuital model. The observed discrepancies are explained with a partial coating of the CNT, that determine a limited use of the available electrode surface area. To analyze the CNT coating effectivene...



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