Friday, January 30, 2015

Brominated Chemistry for Chemical Vapor Deposition of Electronic Grade SiC

TOC Graphic


Chemistry of Materials

DOI: 10.1021/acs.chemmater.5b00074




Milan Yazdanfar, Örjan Danielsson, Emil Kalered, Pitsiri Sukkaew, Olle Kordina, Daniel Nilsson, Ivan G. Ivanov, Lars Ojamäe, Erik Janzén and Henrik Pedersen

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