Thursday, October 23, 2014

Novel chemical route for atomic layer deposition of MoS2 thin film on SiO2/Si substrate




Nanoscale , 2014, Advance Article

DOI: 10.1039/C4NR04816D, Paper

Zhenyu Jin, Seokhee Shin, Do Hyun Kwon, Seung-Joo Han, Yo-Sep Min

An amorphous MoS2 thin film is grown at 100 [degree]C on SiO2 /Si by atomic layer deposition using molybdenum hexacarbonyl and dimethyldisulfide. The as-grown film is crystallized with (002) basal planes in a direction parallel to the substrate.

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