Thursday, April 17, 2014

Inverted process for graphene integrated circuits fabrication




Nanoscale , 2014, Advance Article

DOI: 10.1039/C3NR06904D, Paper

Hongming Lv, Huaqiang Wu, Jinbiao Liu, Can Huang, Junfeng Li, Jiahan Yu, Jiebin Niu, Qiuxia Xu, Zhiping Yu, He Qian

CMOS compatible 200 mm two-layer-routing technology is employed to fabricate graphene field-effect transistors and monolithic graphene ICs.

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