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Monday, April 14, 2014
Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
The Journal of Physical Chemistry C
DOI: 10.1021/jp5009412
Matthieu J. Weber, Adriaan J. M. Mackus, Marcel A. Verheijen, Valentino Longo, Ageeth A. Bol and Wilhelmus M. M. Kessels
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