Nanoscale , 2014, Accepted Manuscript
DOI: 10.1039/C3NR06251A, Communication
DOI: 10.1039/C3NR06251A, Communication
Byung-Hyun Lee, Dong-Il Moon, Hyunjae Jang, Hee-Jeong Hong, Chang-Hoon Kim, Myeong-Lok Seol, Ji-Min Choi, Dong-Il Lee, Min-Woo Kim, Jun-Bo Yoon, Yang-Kyu Choi
A mechanical and electrical transistor structure (METS) is proposed for effective voltage scaling. The sub-2 nm nanogap by atomic layer deposition (ALD) without stiction and the application of dielectric with...
The content of this RSS Feed (c) The Royal Society of Chemistry
A mechanical and electrical transistor structure (METS) is proposed for effective voltage scaling. The sub-2 nm nanogap by atomic layer deposition (ALD) without stiction and the application of dielectric with...
The content of this RSS Feed (c) The Royal Society of Chemistry
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